{"id":3470,"date":"2021-11-27T15:08:47","date_gmt":"2021-11-27T06:08:47","guid":{"rendered":"https:\/\/connect.nissha.com\/npt\/?page_id=3470"},"modified":"2023-06-09T09:55:45","modified_gmt":"2023-06-09T00:55:45","slug":"photolithography","status":"publish","type":"page","link":"https:\/\/connect.nissha.com\/npt\/technology\/patterning\/photolithography\/","title":{"rendered":"\u30ed\u30fc\u30eb to \u30ed\u30fc\u30eb\u30d5\u30a9\u30c8\u30ea\u30bd"},"content":{"rendered":"
\r\n

NISSHA\u306e\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3<\/h2>\r\n
\r\n

\u9ad8\u7cbe\u5ea6\u306a\u30d5\u30a9\u30c8\u30ea\u30bd\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0\u52a0\u5de5\u306e\u5b9f\u73fe<\/h3>\r\n

\r\n
\r\n\u52a0\u5de5\u7cbe\u5ea6\u3068\u751f\u7523\u6027\u306b\u512a\u308c\u305f\u30ed\u30fc\u30eb to \u30ed\u30fc\u30eb\u65b9\u5f0f\u306e\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u3001\u5b89\u5b9a\u3057\u305f\u54c1\u8cea\u3067\u306e\u5927\u91cf\u751f\u7523\u306b\u5bfe\u5fdc\u3057\u307e\u3059\u3002
\r\n\u5fae\u7d30\u306a\u30bb\u30f3\u30b5\u30fc\u30d1\u30bf\u30fc\u30f3\u3092\u9ad8\u3044\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u7cbe\u5ea6\u3067\u5f62\u6210\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u3067\u3059\u3002

\r\n\u9577\u5e74\u30ce\u30a6\u30cf\u30a6\u3092\u57f9\u3063\u305f\u30ed\u30fc\u30eb\u642c\u9001\u6280\u8853\u3068\u30d5\u30a9\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u3092\u7d44\u5408\u305b\u3001\u30cf\u30a4\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002<\/p>\r\n<\/div>\r\n

\r\n

\u25cf\u4ed5\u69d8<\/h4>\r\n\r\n\r\n\r\n\r\n\r\n
\u6210\u819c\u6750\u6599<\/th>\r\nITO\u3001Cu\u3001Ni\u306a\u3069\u306e\u5404\u7a2e\u91d1\u5c5e\u304a\u3088\u3073\u3053\u308c\u3089\u306e\u5408\u91d1<\/td>\r\n<\/tr>\r\n
\u30d9\u30fc\u30b9\u30d5\u30a3\u30eb\u30e0<\/th>\r\nCOP(ITO\/Cu),PET(ITO,Cu\u5408\u91d1\u306a\u3069)<\/td>\r\n<\/tr>\r\n
\u6709\u52b9\u9732\u5149\u30a8\u30ea\u30a2<\/th>\r\nMax 500\u00d7600mm\u3000\u203b\u7279\u6b8a\u4ed5\u69d8\u6700\u5927\u30b5\u30a4\u30ba\uff1a500\u00d71000mm<\/td>\r\n<\/tr>\r\n
Line\/Space<\/th>\r\n10\/10\u03bcm<\/td>\r\n<\/tr>\r\n<\/tbody><\/table>\r\n
\r\n

ITO\u3001Cu\u306e\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u6280\u8853\u306e\u8a73\u7d30\u306f\u3053\u3061\u3089 \"\"<\/a><\/p>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n\r\n\r\n

\r\n
\r\n

\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306e\u30d7\u30ed\u30bb\u30b9<\/h3>\r\n\r\n
    \r\n
  1. \r\n
    \r\n
    \r\n

    1. \u30e9\u30df\u30cd\u30fc\u30c8<\/p>\r\n

    \u7247\u9762\u3001\u4e21\u9762\u30e9\u30df\u30cd\u30fc\u30c8\u3069\u3061\u3089\u3082\u53ef\u80fd\u3067\u3001\u30cb\u30fc\u30ba\u306b\u5fdc\u3058\u5bfe\u5fdc\u81f4\u3057\u307e\u3059\u3002
    \r\n \u9ad8\u7cbe\u5ea6\u306e\u5f35\u529b\uff08\u30c6\u30f3\u30b7\u30e7\u30f3\uff09\u5236\u5fa1\u306b\u3088\u308a\u9ad8\u3044\u5bf8\u6cd5\u7cbe\u5ea6\u3001\u53cd\u308a\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002
    \r\n \u30e9\u30df\u30cd\u30fc\u30c8\u6642\u306b\u306f\u71b1\u3092\u304b\u3051\u308b\u3053\u3068\u3067\u3001\u30d5\u30a3\u30eb\u30e0\u540c\u58eb\u306e\u5bc6\u7740\u6027\u3092\u9ad8\u3081\u3066\u3044\u307e\u3059\u3002
    \r\n \u307e\u305f\u771f\u7a7a\u74b0\u5883\u4e0b\u3067\u306e\u30e9\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u3082\u53ef\u80fd\u3067\u3059\u3002
    \r\n \u3053\u308c\u306b\u3088\u308a\u30a8\u30a2\u30fc\u565b\u307f\u306e\u7121\u3044\u30e9\u30df\u30cd\u30fc\u30c8\u3092\u884c\u3044\u3001\u9ad8\u7cbe\u7d30\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u3092\u5b9f\u73fe\u3067\u304d\u307e\u3059\u3002<\/p>\r\n <\/div>\r\n

    \r\n \"\u30e9\u30df\u30cd\u30fc\u30c8\"\r\n <\/div>\r\n <\/div>\r\n <\/li>\r\n
  2. \r\n
    \r\n
    \r\n

    2. \u9732\u5149<\/p>\r\n

    \u30d5\u30a9\u30c8\u30de\u30b9\u30af\u3092\u7528\u3044\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u3092\u9732\u5149\u3057\u307e\u3059\u3002
    \r\n \u57fa\u6750\u3068\u30de\u30b9\u30af\u306e\u4f4d\u7f6e\u5408\u308f\u305b\u6280\u8853\u3092\u8ffd\u6c42\u3057\u3001\u9ad8\u3044\u4f4d\u7f6e\u7cbe\u5ea6\u3067\u5f62\u6210\u3057\u307e\u3059\u3002<\/p>\r\n <\/div>\r\n

    \r\n \"\u9732\u5149\"\r\n <\/div>\r\n <\/div>\r\n <\/li>\r\n
  3. \r\n
    \r\n
    \r\n

    3. \u73fe\u50cf\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0\u30fb\u5265\u96e2<\/p>\r\n

    \u73fe\u50cf\u2192\u30a8\u30c3\u30c1\u30f3\u30b0\u2192DFR\u5265\u96e2\u3068\u3044\u3046
    \r\n 3\u3064\u306e\u30d7\u30ed\u30bb\u30b9\u3067\u52a0\u5de5\u3057\u307e\u3059\u3002
    \r\n \u81ea\u52d5\u5efa\u6d74\u3084\u6db2\u7ba1\u7406\u30b7\u30b9\u30c6\u30e0\u306a\u3069\u306b\u3088\u308a\u3001
    \r\n \u54c1\u8cea\u5411\u4e0a\u3068\u30b3\u30b9\u30c8\u30c0\u30a6\u30f3\u3092\u4e21\u7acb\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\r\n <\/div>\r\n

    \r\n \"\u73fe\u50cf\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0\u30fb\u5265\u96e2\"\/\r\n <\/div>\r\n <\/div>\r\n <\/li>\r\n
  4. \r\n
    \r\n
    \r\n

    4. \u30a2\u30cb\u30fc\u30eb<\/p>\r\n

    \u30af\u30ea\u30fc\u30f3\u304b\u3064\u5747\u4e00\u306b\u30d5\u30a3\u30eb\u30e0\u3092\u9ad8\u6e29\uff08\u53ef\u80fd\u6e29\u5ea6 ~190\u2103\uff09\u3067\u71b1\u51e6\u7406\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002
    \r\n \u9ad8\u7cbe\u5ea6\u306a\u7089\u5185\u6e29\u5ea6\u7ba1\u7406\u306b\u3088\u308a\u5b89\u5b9a\u3057\u305f\u30a2\u30cb\u30fc\u30ea\u30f3\u30b0\u3092\u884c\u3044\u307e\u3059\u3002
    \r\n \u88fd\u54c1\u306e\u91d1\u5c5e\u6210\u5206\u9178\u5316\u3092\u6291\u5236\u3057\u306a\u304c\u3089\u51e6\u7406\u3092\u5b9f\u73fe\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\r\n <\/div>\r\n

    \r\n \"\u30a2\u30cb\u30fc\u30eb\"\r\n <\/div>\r\n <\/div>\r\n <\/li>\r\n<\/ol>\r\n\r\n<\/div>\r\n<\/div>\r\n\r\n
    \r\n

    \u52a0\u5de5\u306e\u59d4\u8a17\u3092\u3054\u691c\u8a0e\u4e2d\u306e\u65b9\u3078<\/h2>\r\n

    \u53d7\u8a17\u52a0\u5de5\u306e\u6d41\u308c<\/h3>\r\n
      \r\n
    1. \r\n
      \r\n

      \u30d2\u30a2\u30ea\u30f3\u30b0<\/h4>\t\t \r\n

      \u307e\u305a\u306f\u3054\u8981\u671b\u3092\u304a\u805e\u304b\u305b\u304f\u3060\u3055\u3044\u3002\r\n\u5177\u4f53\u7684\u4ed5\u69d8\u304c\u56fa\u307e\u3063\u3066\u3044\u306a\u304f\u3066\u3082\u3001\u3053\u3093\u306a\u4e8b\u3063\u3066\u3067\u304d\u306a\u3044\u304b\uff1f\u3068\u3044\u3046\u30a2\u30a4\u30c7\u30a2\u30ec\u30d9\u30eb\u304b\u3089\u3067\u3082OK\u3067\u3059\u3002<\/p>\r\n <\/div>\r\n

      \"\"<\/div>\r\n <\/li>\r\n
    2. \r\n
      \r\n

      \u8a2d\u8a08\u30fb\u4ed5\u69d8\u306e\u691c\u8a0e\u3001\u3054\u63d0\u6848<\/h4>\t\t \r\n

      \u304a\u4f3a\u3044\u3057\u305f\u5185\u5bb9\u3092\u3082\u3068\u306b\u3001\u5f0a\u793e\u306e\u751f\u7523\u6280\u8853\u90e8\u9580\u304c\u8a2d\u8a08\u3084\u4ed5\u69d8\u306e\u8a73\u7d30\u3001\u6700\u9069\u306a\u52a0\u5de5\u30d7\u30ed\u30bb\u30b9\u3092\u3054\u63d0\u6848\u3044\u305f\u3057\u307e\u3059\u3002<\/p>\r\n <\/div>\r\n

      \"\"<\/div>\r\n <\/li>\r\n
    3. \r\n
      \r\n

      \u4ed5\u69d8\u6c7a\u5b9a\/\u5fa1\u898b\u7a4d\u63d0\u793a\/\u53d7\u8a17<\/h4>\t\t \r\n

      \u3054\u63d0\u6848\u3057\u305f\u5185\u5bb9\u3092\u5143\u306b\u304a\u5ba2\u3055\u307e\u3068\u6253\u3061\u5408\u308f\u305b\u3092\u884c\u3044\u3001\u4ed5\u69d8\u6848\u3092\u6c7a\u5b9a\u3057\u307e\u3059\u3002
      \r\n\u6280\u8853\u7684\u306a\u96e3\u6613\u5ea6\u306b\u5fdc\u3058\u305f\u8a66\u4f5c\u30fb\u691c\u8a3c\u306e\u30ed\u30fc\u30c9\u30de\u30c3\u30d7\u3092\u6dfb\u3048\u3066\u5fa1\u898b\u7a4d\u3092\u63d0\u793a\u3055\u305b\u3066\u9802\u3044\u305f\u5f8c\u3001\u53d7\u8a17\u3057\u307e\u3059\u3002<\/p>\r\n <\/div>\r\n

      \"\"<\/div>\r\n <\/li>\r\n
    4. \r\n
      \r\n

      \u8a66\u4f5c\u30fb\u691c\u8a3c<\/h4>\t\t \r\n

      \u53d7\u8a17\u3057\u305f\u6848\u4ef6\u3054\u3068\u306b\u5c02\u9580\u306e\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u30c1\u30fc\u30e0\u3092\u7de8\u6210\u3057\u30ad\u30c3\u30af\u30aa\u30d5\u3057\u307e\u3059\u3002
      \r\n\u307e\u305a\u30c6\u30b9\u30c8\u8a66\u4f5c\u3092\u5b9f\u65bd\u3057\u3001\u6027\u80fd\u3001\u54c1\u8cea\u3092\u3054\u78ba\u8a8d\u3044\u305f\u3060\u304d\u307e\u3059\u3002\r\n\u5206\u6790\u30fb\u6e2c\u5b9a\u7b49\u306e\u591a\u69d8\u306a\u8a55\u4fa1\u6a5f\u5668\u3092\u7528\u3044\u3001\u3054\u5e0c\u671b\u5185\u5bb9\u306e\u8a55\u4fa1\u30ec\u30dd\u30fc\u30c8\u3092\u4f5c\u6210\u3044\u305f\u3057\u307e\u3059\u3002
      \r\n\u307e\u305f\u8a66\u4f5c\u54c1\u306e\u8a55\u4fa1\u3092\u30d5\u30a3\u30fc\u30c9\u30d0\u30c3\u30af\u3044\u305f\u3060\u304f\u3053\u3068\u3067\u3001\u6027\u80fd\u3001\u54c1\u8cea\u3001\u5de5\u6cd5\u306e\u30d6\u30e9\u30c3\u30b7\u30e5\u30a2\u30c3\u30d7\u3092\u884c\u3044\u307e\u3059\u3002<\/p>\r\n <\/div>\r\n

      \"\"<\/div>\r\n <\/li>\r\n <\/ol>\r\n<\/div>\r\n
      \r\n

      \u54c1\u8cea\u7ba1\u7406\u4f53\u5236<\/h2>\r\n\r\n\r\n
      \r\n
      \r\n
      \r\n
      \r\n

      \u304a\u5ba2\u69d8\u306b\u78ba\u304b\u306a\u88fd\u54c1\u3092\u3054\u63d0\u4f9b\u3067\u304d\u308b\u3088\u3046\u3001\u5de5\u7a0b\u81ea\u52d5\u7ba1\u7406\u30b7\u30b9\u30c6\u30e0\u30fb\u30c7\u30fc\u30bf\u5206\u6790\u30c4\u30fc\u30eb\u30fb\u81ea\u52d5\u5916\u89b3\u691c\u67fb\u30fb\u5404\u7a2e\u8a55\u4fa1\u6a5f\u5668\u7b49\u306e\r\n\u591a\u69d8\u306a\u30c4\u30fc\u30eb\u3092\u99c6\u4f7f\u3057\u3066\u30d7\u30ed\u30bb\u30b9\u3092\u80fd\u52d5\u7684\u306b\u7ba1\u7406\u3057\u3001\u30ea\u30fc\u30f3\u306a\u751f\u7523\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002

      \r\n\u307e\u305f\u3001\u30d3\u30c3\u30b0\u30c7\u30fc\u30bf\u3084AI\u306e\u6d3b\u7528\u306b\u3088\u308a\u3001\u691c\u67fb\u4f53\u5236\u306e\u52b9\u7387\u5316\u3068\u751f\u7523\u6027\u306e\u5411\u4e0a\u306b\u52aa\u3081\u3066\u3044\u307e\u3059\u3002<\/p>\r\n

      \r\n

      \u8a73\u3057\u304f\u306f\u3053\u3061\u3089 \"\"<\/a><\/p>\r\n<\/div>\r\n<\/div>\r\n

      \r\n\"\u54c1\u8cea\u7ba1\u7406\u4f53\u5236\"\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n\r\n
      \r\n

      NISSHA\u306e\u751f\u7523\u6280\u8853<\/h2>\r\n<\/div>\r\n\r\n
      \r\n
      \r\n

      \u8cbc\u5408<\/h3>\r\n \"\u8cbc\u5408\"<\/a>\r\n <\/div>\r\n
      \r\n

      \u30ab\u30c3\u30c8<\/h3>\r\n \"\u30ab\u30c3\u30c8\"<\/a>\r\n <\/div>\r\n
      \r\n

      \u30d1\u30bf\u30fc\u30cb\u30f3\u30b0<\/h3>\r\n \"\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\"<\/a>\r\n <\/div>\r\n
      \r\n

      \u30e2\u30b8\u30e5\u30fc\u30eb\u52a0\u5de5<\/h3>\r\n \"\u30e2\u30b8\u30e5\u30fc\u30eb\u52a0\u5de5\"<\/a>\r\n <\/div>\r\n<\/div>\r\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":4,"featured_media":0,"parent":3544,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-3470","page","type-page","status-publish","hentry"],"acf":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/connect.nissha.com\/npt\/wp-json\/wp\/v2\/pages\/3470","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/connect.nissha.com\/npt\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/connect.nissha.com\/npt\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/connect.nissha.com\/npt\/wp-json\/wp\/v2\/users\/4"}],"replies":[{"embeddable":true,"href":"https:\/\/connect.nissha.com\/npt\/wp-json\/wp\/v2\/comments?post=3470"}],"version-history":[{"count":79,"href":"https:\/\/connect.nissha.com\/npt\/wp-json\/wp\/v2\/pages\/3470\/revisions"}],"predecessor-version":[{"id":4007,"href":"https:\/\/connect.nissha.com\/npt\/wp-json\/wp\/v2\/pages\/3470\/revisions\/4007"}],"up":[{"embeddable":true,"href":"https:\/\/connect.nissha.com\/npt\/wp-json\/wp\/v2\/pages\/3544"}],"wp:attachment":[{"href":"https:\/\/connect.nissha.com\/npt\/wp-json\/wp\/v2\/media?parent=3470"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}